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FILM-SCS1050Z/70 pvd coating machine/magnetron sputter coating equipment/vacuum solar collection tube coater

Location:
Changsha, China ( Mainland)
Status:
New
Sample Availibility:
yes
Payment Terms:
Cash, Bank Transfer, Letter of Credit, T/T, L/C
Categories:
Home > Chemicals > Coatings

Product Description

FILM-SCS1050Z/70 pvd coating machine/magnetron sputter coating equipment/vacuum solar collection tube coater

Equipment introduction

This FILM-SCS series equipment has obtained “Hunan Province High-Tech Certification”; FILM has its own independent intellectual property in a number of core technologies; FILM-SCS1050Z/70 pvd coating machine/magnetron sputter coating equipment/vacuum solar collection tube coater is a kind of magnetron reactive sputtering coating machine with high voltage DC power supply, it is mainly used to plate aluminum nitride film with gradient accurate chemical ratio in the production of vacuum solar collector.

FILM-SCS1050Z/70 pvd coating machine/magnetron sputter coating equipment/vacuum solar collection tube coater is made up of the host base, coating chamber, vacuum system, target rotation speed regulation system, workpiece rotation speed regulation system, water cooling control system and electric control cabinet (TP and PLC auto control system), etc. It is applying advanced auto control technology on TP and PLC, users can compile various production processed conveniently through the man-machine dialogue, to reach high precision in chemical ratio coating. FILM-SCS1050Z/70 pvd coating machine/magnetron sputter coating equipment/vacuum solar collection tube coater can also plate all kinds of pure metal film and alloy membrane on various substrates’ surface by changing target material, or changing the jig of substrate (workpiece). It is widely applied in photo-thermal utilization and solar vacuum tube coating system.

Features

1. The structure and size of coating chamber: vertical cylindrical front door structure, inner cavity size: Φ1050 x 2700 mm, loading capacity: Φ 47 x 70 pcs/time

2. Vacuum system: Main pump: K-630 oil diffusion pump

Backing pump: 2X-70 rotary vane mechanical pump, 3 sets

Holding pump: 2X-15 rotary vane mechanical pump, 1 set

Valve: electromagnetic pneumatic type

3. Constant pressure function: constant pressure function is designed according to the curve of increment of reactive Nitrogen capacity and decrement of voltage while reaction sputtering, to keep capacity and voltage before the inflection point value

4. Upper and lower limit of Nitrogen: this button can be used to set the upper and lower limit of Nitrogen capacity when at constant pressure level

5. Parameter group consists of three sets of values. The value Nitrogen should plus or minus while voltage changing and the time needed for parameter changing can be input for each sets of values according to the process requirement.

Sample pictures

Specification

FILM-SCS1050Z/70 pvd coating machine/magnetron sputter coating equipment/vacuum solar collection tube coater model and technical parameters

Performance/Model

FILM-SCS700

FILM-SCS850

FILM-SCS1050

FILM-SCS1280

Coating chamber size(mm)

Φ2000×H2450(optional)

Φ850×H2150~H2800(optional)

Φ1050×H2150~H2800(optional)

Φ1280×H2150~2800(optional)

Available workpiece size

External diameter*wall thickness*length Φ47mm*(1~2mm)*2200mm

Power source type

grid bias power supply, DC supply, medium frequency power supply

Vacuum chamber structure

vertical front door structure, rear air exhaust system

Rotating mode of workpiece turntable

Double planetary revolution and autorotation, variable frequency speed regulation AC variable frequency motor stepless speed regulation, revolution speed range: 0.3-1.5 rpm, rotation speed range: 4.5-23.6 rpm

Vacuum chamber material

Choose well-qualified SS304 to make the vacuum chamber

Limit vacuum

8.0x10-4 Pa

Pump-down time(no load)

Pump the atmosphere to 8.0x10-3Pa ≤15 minutes

Vacuum obtaining system

Diffusion pump/molecular pump + roots pump + mechanical pump + holding pump (specific model can be configured against customer’s requirements)

Coating method

Magnetron sputtering coating

Operating film type

Metal film, reaction film, compound film, multi-layer film, semiconducting film

Magnetron target type

Cylindrical magnetron target

Power of magnetron power source and number of magnetron target

Configure against different coating process and customer’s requirements

Supply voltage

AC/380V/50Hz/3 phase

Process gas

2-path or 3-path process gas flow control and display system

Cooling method

Water circulation cooling method (users provide the cooling equipment themselves)

Control method

Manual/automatic integration mode, touch screen operation, PLC or computer control

Unit total power

75 kW

Alarm and protection

Alarm water shortage, overcurrent and overvoltage, open circuit and other abnormal conditions of pumps, targets and so on and execute relevant protective measures and electric interlock function

Other technical parameters

Water pressure≥0.2 mPa, water temperature≤25°C, atmospheric pressure 0.5-0.8 mPa

Remark

The specific configuration of coating equipment can be designed according to process requirements of coating

Products pictures



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Contact Information

Company:
 Hunan Film Vacuum Equipment Co., Ltd.
Phone Number:
  0086-731-88297387
Fax Number:
 0086-731-88721192
 
Hunan Film Vacuum Equipment Co., Ltd.
 Hunan , China FREE
 

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